Inlet Screen Installation - Varian E-series Manual De Instrucciones

Graph of inlet pressure vs foreline pressure with fixed inlet flow (N2)

INLET SCREEN INSTALLATION

The inlet screens mod. 969-9316 prevents the
blades of the pump from being damaged by debris
greater than 1.4 mm diameter.
The inlet screen, however, will reduce the pumping
speed by about 20%.
The inlet screen is fitted in the upper part of the
pump, as shown in the figure.
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TECHNICAL INFORMATION
The screen can be mounted on each pump model.
The following figure show the overall flange dimen-
sions with the protection screen fitted on pump with
ISO flange.
87-900-942-01(A)