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HIGH VACUUM FLANGE CONNECTION
To connect the Turbo pump to the ISO inlet flange,
remove the outer ring and position the centering
ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
HIGH VACUUM FLANGE CONNECTION CONFIGURATIONS
For ConFlat flange connections we recommend
using Varian hardware.
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange faces
meet.
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
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TECHNICAL INFORMATION
CAUTION
87-901-010-01
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