High Vacuum Flange Connection Configurations - Varian Mini-TASK Manual De Instrucciones

For ConFlat flange connections we recommend
using Varian hardware.

HIGH VACUUM FLANGE CONNECTION CONFIGURATIONS

To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange. Note that the 2.75" CF flange
has six blind holes.
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange faces
meet.
!
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
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TECHNICAL INFORMATION
CAUTION
87-900-962-01(A)