Technical Specification - Agilent Technologies Turbo-V 903 Manual De Instrucciones

18 Technical Information

Technical Specification

Technical Specification

Table 1
Pumping speed
Compression ratio
Base pressure with
recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Cooling requirements
Operating ambient
temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Noise level
Power supply Input for TV903
Pumping System Power
Supply (969-6501):
264/306
Technical Specification
N2: 680 l/s
He: 700 l/s
N2: > 5 x 10
He: 6 x 10
< 1 x 10
(< 1 x 10
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after
the completion of test dome bake-out, with a
Turbopump fitted with a ConFlat flange and using the
recommended pre-vacuum pump)
Custom ISO 160 F
KF 25
48000 rpm
< 6 minutes
DS 402, TriScroll 300
any
Natural air convection
Forced air or water optional
+10 °C to +45 °C
80° C at inlet flange max.
< 0.01 μm at inlet flange
permanent lubrication
Forced air
FAN off = < 50 dB(A) at 1 meter
FAN on = < 55 dB(A) at 1 meter
Input voltage: 200 - 240 Vac (± 10%)
Turbo-V 903 Pumping System User Manual / 87-901-016-01
6
3
mbar
-7
Torr)
-7
(A)