Technical Specification - Agilent Technologies Turbo-V 3K-G Manual De Instrucciones

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Technical Specification

Tab. 2
Technical Specification
Pumping speed (without inlet screen)
N
:
2
Ar:
He:
Compression ratio
N
:
2
Ar:
He:
Base pressure with recommended forepump
Inlet flange
Foreline flange
Nominal rotational speed
Start-up time without gas load and with the
recommended forepump
Minimum recommended forepump
Operating position
Operating ambient temperature
Max rotor temperature
Lubricant
Cooling requirements
Coolant water
Noise level
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01
2200 l/s
2050 l/s
1900 l/s
> 10
7
> 10
8
6 x 10
3
10
mbar
-8
10
Torr
-8
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a CFF flange and using the recommended pre-vacuum
pump)
ISO 250 F
KF 40 NW
31800 rpm
< 6 minutes
At least 60 m
/h (but depending on the inlet gas flow)
3
Any
+5 °C to +35 °C
120 °C
permanent lubrication
Water
Recommended flow: 200 l/h
Temperature: +15 °C to +30 °C
Pressure: 3 to 5 bar (45 to 75 psi)
<60 dB(A) at 1 meter
(C)
Technical Information
Technical Specification
17
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