Agilent Technologies Turbo-V 1K-GRetrofit Manual De Instrucciones página 286

17 Technical Information
Pump Used with Corrosive Gases
Figure 43
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1 Purge gas line
2 Pressure regulator
3 Gas purge valve
4 Gas purge port
5 Forevacuum pump
6 Turbopump
7 Vent valve
Purge layout
Turbo-V 1K-G Retrofit User Manual / 87-900-996-01 (B)