Agilent Technologies Turbo-V 3K-G Manual De Instrucciones página 309

2500
2000
1500
1000
500
0
1,0E-08
Figure 9
1,E+09
1,E+08
1,E+07
1,E+06
1,E+05
1,E+04
1,E+03
1,E+02
1,E+01
1,E+00
1,00E-03
Figure 10
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01
1,0E-07 1,0E-06
Typical Pumping Speed curves
1,00E-02
Nitrogen
Compression Ratio Vs. Foreline Pressure
1,0E-05 1,0E-04 1,0E-03
Inlet Pressure [mbar]
N2 He Ar
1,00E-01
Foreline Pressure [mbar]
Helium Argon
(C)
Technical Information
Technical Specification
1,0E-02 1,0E-01
1,00E+00 1,00E+01
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