8
Technical Information
Pump Used with Corrosive and Oxidizing Gases
Figure 42
4
5
6
7
8
9
10 Vent valve
262/302
Purge gas line
Pressure regulator
Gas purge valve
Gas purge port
Forevacuum pump
Turbopump
TwisTorr 305-IC User Manual / 87-901-058-01 (A.00)