Agilent Technologies TwisTorr 404 FS Serie Manual De Istrucciones página 318

17 Technical Information
Pump Used with Corrosive Gases
Figure 42
318/328
1 Purge gas line
2. Pressure regulator
3. Gas purge valve
4. Gas purge port
5. Forevacuum pump
6. Turbopump
7. Vent valve
Purge layout
TwisTorr 404 FS User Manual / 87-901-048-01