Agilent Technologies TwisTorr 305 FSQ Manual Del Usuario página 188

Technical Information
Compliance with:
When the TwisTorr 305 FSQ has been stored at a temperature less than 5°C, wait
NOTE
until the system has reached the above mentioned temperature before switch the
TwisTorr 305 FSQ on.
Table 2
Technical data TwisTorr 305 SF (X3513-64067)
Pumping speed
N
2
He
H
2
Max gas flow rate (N
Note: value refer to water-cooling pump version with:
• water temperature between 15°C and 20°C (non condensing,)
• backing pump with pumping speed equal or above 5 m
Compression ratio
N
2
He
H
2
NOTE: For all other technical specifications, please refer to table 1.
188
TwisTorr 305 SF (X3513-64067) - Technical Specification
):
2
EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive
2014/30/EU
Directive 2011/65/EU
Main Flange (ISO 100)
250 l/s
255 l/s
220 l/s
450 sccm
/h
3
Total
2 x 10
8
1 x 10
5
2 x 10
4
Agilent TwisTorr 305 FSQ & 305 SF User Manual
Side Port (KF40)
N : 11 l/s
2
He: 15 l/s
H : 14.5 l/s
2
Foreline/Side Port
N : 2.1 x 10
2
2
He: 1.4 x 10
2
H : 1 x 10
2
2