Brooks Instrument GF100 Serie Manual De Instrucciones página 17

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-5 Specifications for GF100/GF120/GF125 Series with EtherCAT Communications
Performance Performance Performance
Performance Performance
Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range Full Scale Flow Range
Flow Accuracy Flow Accuracy
Flow Accuracy Flow Accuracy Flow Accuracy
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility
Flow Settling Time (NC Valve) Flow Settling Time (NC Valve)
Flow Settling Time (NC Valve) Flow Settling Time (NC Valve) Flow Settling Time (NC Valve)
Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve) Flow Settling Time (NO Valve)
Pressure Insensitivity Pressure Insensitivity
Pressure Insensitivity Pressure Insensitivity Pressure Insensitivity
Control Range Control Range Control Range
Control Range Control Range
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo
#of Bins #of Bins #of Bins #of Bins #of Bins
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve) Valve Shut Down (N.O. Valve)
Zero Stability Zero Stability Zero Stability
Zero Stability Zero Stability
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range
Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range* Differential Pressure Range*
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external)
Leak Integrity (external) Leak Integrity (external)
Mechanical Mechanical
Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type
Wetted Materials Wetted Materials Wetted Materials Wetted Materials Wetted Materials
Surface Finish Surface Finish Surface Finish
Surface Finish Surface Finish
Diagnostics & Display Diagnostics & Display
Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights
Status Lights Status Lights Status Lights
Alarms Alarms Alarms Alarms Alarms
Display Type Display Type Display Type Display Type Display Type
V V V V V iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance iewing Angle / Viewing Distance
U U U U U nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution nits Displayed / Resolution
nits Displayed / Resolution
Electrical Electrical Electrical Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection Electrical Connection Electrical Connection
Digital Communication Digital Communication Digital Communication Digital Communication Digital Communication
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption
Compliance Compliance Compliance Compliance Compliance
EMC EMC
EMC EMC EMC
Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance
*Argon gas applications require an additional 10 psid differential pressure. Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on
outlet (example SiCl4). Contact Brooks Technical Support for more information.
GF100 GF100 GF100 GF100 GF100 GF120 GF120 GF120 GF120 GF120
3 sccm to 55 slm
+1% S.P. > 20-100%; +0.2% F.S. 2-20%
< 1 sec 700ms
<1.5 sec
Not Applicable
2-100% (Normally Closed Valve)
3-100% (Normally Open Valve)
Standard
11 bins
0.15% of F.S.
2% of F.S.
< + 0.15% F.S. per year
Zero: 0.005% F.S. per
3-860 sccm = 7-45 psid
861- 7200 sccm = 10-45 psid
7201-55000 sccm = 15-45 psid
500 psia max
Normally Closed
Normally Open
Meter (no valve)
SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
10μ inch Ra
Control Valve Output, Network Interruption, Temperature High/Low, Pressure High/Low, Power Surge/Sag
320 mA max. @ 18-30 Vdc, 230 mA max. @ 24 Vdc (under typical operating conditions)
EMC Directive 2014/30/EU Evaluation Standard EN61326-1:2013
RoHS Directive (2011/65/EU)
REACH Directive EC (1907/2006)
GF125 GF125 GF125 GF125 GF125
< + 0.15% S.P.
300ms (3-860 sccm N2 Eq.)
400ms (861-7200 sccm N2 Eq.)
500ms (7201-30000 sccm N2 Eq.)
<700ms (30001-55000 sccm N2 Eq.)
< 1% S.P. up to 5 psi/sec
upstream press. spike
o
C
10-50 o C
100 psia max
1x10^ -10 atm. cc/sec He
5μ inch Ra
Run, Error, Power, Network Status
Top Mount Integrated LCD
Rotatable / 10 feet
Flow (%), Temp. ( o C), Pressure (psia, kPa) / 0.1 (unit)
Power via 5-pin M8 Connector, EtherCAT via RJ45 jacks
EtherCAT
Micro-USB
Section 1 Introduction
GF100 Series
GF120XSL GF120XSL GF120XSL GF120XSL GF120XSL GF120XSD GF120XSD GF120XSD GF120XSD GF120XSD
4 sccm to 25 sccm >25 sccm to 1 slpm
±1% S.P. 35-100%; ±0.35% F.S. 2-35%
< 3 sec
----------
----------
2-100% (Normally Closed Valve)
----------
----------
<1% of F.S.
----------
< + 0.6% F.S. per year
Zero 0.005% of F.S. per °C
10 Torr - 30 psid typical
For more details
consult factory
up to 500 psia max
Normally Closed
5μ inch Ra
1-11