Brooks Instrument GF100 Serie Manual De Instrucciones página 9

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-1 Industry Standard References
Reference Number
MIL-STD-810
SEMI E12
SEMI E16
SEMI E17
SEMI E18
SEMI E27
SEMI E28
SEMI E52
SEMI E54
SEMI E56
SEMI E66
SEMI E67
SEMI E68
SEMI E69
SEMI E80
SEMI E16-90
SEMI F19
SEMI F20
SEMI F36
SEMI F37
SEMI F44
SEMI F45
SEMI F47
SEMI S2
SEMI S9
SEMI S10
SEMI S12
ETG.1000.2
ETG.1000.3
ETG.1000.4
ETG.1000.5
ETG.1000.6
ETG.1020
ETG.2000
ETG.5001.1
ETG.5003.1
ETG.5003.2020
ETG.5003.2021
ETG.5003.2022
ETG.5003.2023
Reference Description
Method 514.4, Category 1, Transportation Requirement
Method 516.4, Procedure 1, Functional Shock Test Requirement
Standard temperature and pressure
Guideline for determining and describing MFC leak rates
Guideline for MFC transient characteristics tests
Guideline for temperature specifications of the MFC
Standard for MFC and MFM linearity
Guideline for pressure specifications for the MFC
Practice for referencing gases used in digital MFCs
Sensor actuator network connections for DeviceNet
Test method for detemining accuracy, linearity, repeatability, short-term
reproducibility, hystereses of thermal MFCs
Test method for determining particle contribution by MFCs
Test method for determining reliabilty of MFCs
Test method for determining warm-up time of MFCs
Test method for reproducibilty and zero drift for thermal MFCs
Test method for determining attitude sensitivity of MFCs
Guidelines for determining and describing mass flow controllers leak rates
Specification for the finish of the wetted surface of electro polished
216L stainless steel components
Specifications for 316L stainless steel bar, extruded shapes, plate, and
investment castings for components used in ultra-high purity semi
manufacturing applications
Guide for dimensions and connections of gas distribution components
Method for determination of surface roughness parameters for gas
distribution system components
Guideline for standardization of machined stainless steel weld fittings
Guideline for standardization of machined stainless steel reducing fittings
Specifications for semiconductor processing equipment
voltage sag immunity
Environmental, Health and Safety Guidelines
Dielectric testing
Risk assessment
Decontamination of fielded products
Physical Layer service definition and protocol specification
Data Link Layer service definition
Data Link Layer protocol specification
Application Layer service definition
Application layer protocol specification
EtherCAT Protocol Enhancements
EtherCAT Slave Information
Modular Device Profile - Part 1: General MDP Device Model
Semiconductor Device profile - Part 1: Common Device Profile (CDP)
Specific Device Profile: Enhanced Mass Flow Controller
Specific Device Profile: Mass Flow Controller
Specific Device Profile: Mass Flow Meter
Specific Device Profile: Enhanced Mass Flow Meter
Section 1 Introduction
GF100 Series
1-3