Brooks Instrument GF100 Serie Manual De Instrucciones página 62

Section 5 Product Description Code
GF100 Series
Table 5-5 GF101, GF121 & GF126 Series with EtherCAT Communications Product Description Code
Code Description Code Description Code Description Code Description Code Description
I. I. I. I. I. Base Model Code
II. II. II. II. II.
Package / Finish Specifications
III. III. III. III. III. Configurability
IV. IV. IV. IV. IV. Special Application
V. V. V. V. V. Valve Configuration
VI. VI. VI. VI. Gas or SH MultiFlo Bin
VI.
VII. VII.
VII. VII. Fitting VII.
VIII. VIII. VIII. Downstream Condition VIII. VIII.
IX. IX.
IX. IX. IX. Sensor
X. X. X. X. X. Connector
XI. XI. XI. XI. XI. Customer Special Request
XII. XII. Auto Shut-Off XII.
XII. XII.
XIII. XIII. XIII. Auto Zero XIII. XIII.
XIV. XIV. XIV. Reference Temperature XIV. XIV.
5-6
Code Option Code Option Code Option Code Option Code Option Option Description Option Description Option Description Option Description Option Description
GF GF GF GF High Purity/Ultra High Purity Digital Mass Flow Controllers
GF
101 101
101 101 101 Flow range 55 - 300 slm N2 Equivalent.; 10 Ra HP wetted flow path
121 121 121 121 121 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path
126 126 126 126 126 Flow range 55 - 300 slm N2 Equivalent 5 Ra HP wetted flow path & integrated pressure measurement
C C C C C MultiFlo capable. Standard bins or specific gas/range may be selected
X X X X X Not MultiFlo capable. Specific gas/range required
XX XX XX XX XX Standard
C C C C C Normally Closed valve
M M M M M Meter (No Valve)
XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas Code & Range, i.e. "0004" = Argon and "010L" = 10 slpm
XXXX XXXX XXXX XXXX
SH51 055L SH51 055L
SH51 055L SH51 055L SH51 055L Standard Configuration #51, 55,001 sccm N2 Equivalent (0°C Reference)
SH52 100L SH52 100L SH52 100L SH52 100L SH52 100L Standard Configuration #52, 55,002-100,000 sccm N2 Equivalent (0°C Reference)
SH53 200L SH53 200L SH53 200L SH53 200L SH53 200L Standard Configuration #53, 100,001-200,000 sccm N2 Equivalent (0°C Reference)
SH54 300L SH54 300L SH54 300L SH54 300L SH54 300L Standard Configuration #54, 200,001-300,000 N2 Equivalent (0°C Reference)
V1 V1
V1 V1 V1 1-1/2" body width, 134mm 1/2" VCR male
C1 C1 C1 C1 C1 1-1/2" body width, 92mm C Seal
C2 C2 C2 C2 C2 1-1/2" body width, 114mm C Seal
A A A A A Atmosphere
V V V V V Vacuum
O O O O O
Default Sensor Orientation
E0 E0 E0 E0 E0 EtherCAT Communication
XXXX XXXX XXXX XXXX XXXX Customer Special Request (CSR) Number
A A A A A Auto Shut-Off (Included)
X X X X X
Auto Shut-Off (Not Included)
X X X X X Auto Zero (Not Included)
000 000 000 000 000 0 o o o o o C Reference Calibration (Standard) - Default Setting
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017