Brooks Instrument GF100 Serie Manual De Instrucciones página 19

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Table 1-7 Specifications for GF101/GF121/GF126 Series
Performance Performance Performance Performance Performance
Full Scale Flow Range (N Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.) Eq.)
Full Scale Flow Range (N Full Scale Flow Range (N Eq.) Eq.)
2 2 2 2 2
Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy Flow Accuracy
Repeatability & Reproducibility Repeatability & Reproducibility
Repeatability & Reproducibility Repeatability & Reproducibility Repeatability & Reproducibility
Linearity Linearity Linearity Linearity Linearity
Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time) Response Time (Settling Time)
Normally Closed Valve Normally Closed Valve Normally Closed Valve Normally Closed Valve Normally Closed Valve
Pressure Transducer Pressure Transducer Pressure Transducer
Pressure Transducer Pressure Transducer
Control Range Control Range Control Range Control Range Control Range
MultiFlo MultiFlo MultiFlo MultiFlo MultiFlo
# of Bins # of Bins # of Bins
# of Bins # of Bins
Control Range Control Range Control Range Control Range Control Range
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve) Valve Shut Down (N.C. Valve)
Zero Stability Zero Stability Zero Stability Zero Stability Zero Stability
Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient Temperature Coefficient
Ratings Ratings Ratings Ratings Ratings
Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range Operating Temperature Range
Differential Pressure Range Differential Pressure Range Differential Pressure Range
Differential Pressure Range Differential Pressure Range
Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure Maximum Operating Pressure
Leak Integrity (external) Leak Integrity (external)
Leak Integrity (external) Leak Integrity (external) Leak Integrity (external)
Mechanical Mechanical
Mechanical Mechanical Mechanical
Valve Type Valve Type Valve Type Valve Type Valve Type
Wetted Materials Wetted Materials Wetted Materials
Wetted Materials Wetted Materials
Surface Finish Surface Finish Surface Finish Surface Finish Surface Finish
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights Status Lights Status Lights Status Lights Status Lights
Alarms Alarms
Alarms Alarms Alarms
Display Type Display Type Display Type Display Type Display Type
Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance Viewing Angle / Viewing Distance
Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution Units Displayed / Resolution
Electrical Electrical Electrical
Electrical Electrical
Electrical Connection Electrical Connection Electrical Connection Electrical Connection Electrical Connection
Digital Communication Digital Communication
Digital Communication Digital Communication Digital Communication
Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port Diagnostic /Service Port
Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption Power Supply/Consumption
Compliance Compliance Compliance Compliance Compliance
EMC EMC EMC EMC EMC
Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance Environmental Compliance
GF101 GF101 GF101 GF101 GF101
Span: 0.05% S.P. per
Normally Closed
Meter (no valve)
GF101: SEMI F20 HP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
GF121/GF126: SEMI F20 UHP Compliant, 316L VIM/VAR, Hastelloy C-22, 316L Stainless Steel, 304 Stainless Steel, KM-45
10μ inch Ra
MFC Health, Network Status
Control Valve Output, Network Interruption
Top Mount Integrated LCD
Fixed / 10 feet
o
Flow (%), Temp. ( C), Pressure (psia, kPa) / 0.1 (unit)
RS485/Analog via 9-Pin "D" connector, DeviceNet
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
RS485 via 2.5mm jack
DeviceNet: 545 mA max. @ +11-25 Vdc., 250mA max. @ 24 Vdc (Under typical operating conditions)
RS485/Analog: 6 Watts max @ +15 Vdc. (+10%) (Under typical operating conditions)
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
GF121 GF121 GF121 GF121 GF121
55 to 300 slm
+1% S.P. > 35-100%, +0.35% F.S. 2-35%
< + 0.15% S.P.
+ 0.5% F.S. (included in accuracy)
< 1 sec
5-100% (Normally Closed Valve)
Standard (All typical high flow rate process gases & mixtures supported)
4 Bins
5-100% (Normally Closed Valve)
< 2% of F.S. @ 30 N2 psig/atm out
< + 0.5% F.S. per year
o
C, Zero: 0.005% F.S. per
o
10-50 C
30-90 psid
Controller: 75 psig / Meter: 150 psig
-10
1x10 atm. cc/sec He
5μ inch Ra (0.1 μm Ra)
TM
via 5-Pin "M12" connector
Section 1 Introduction
GF100 Series
GF126 GF126 GF126 GF126 GF126
Ability to measure inlet pressure
o
C
1-13