Brooks Instrument GF100 Serie Manual De Instrucciones página 18

Section 1 Introduction
GF100 Series
Table 1-6 Specifications for GF135 Series
P P P P P erformance erformance erformance erformance erformance
Full Scale Flow Range: Full Scale Flow Range:
Full Scale Flow Range: Full Scale Flow Range: Full Scale Flow Range:
Gasses Supported: Gasses Supported: Gasses Supported: Gasses Supported: Gasses Supported:
Flow Flow Accur Flow Accur Accuracy: Accur acy: acy: acy:
Flow Flow Accur acy:
Repeatability & Repr Repeatability & Repr oducibility: oducibility:
Repeatability & Reproducibility: Repeatability & Repr Repeatability & Repr oducibility: oducibility:
Linearity: Linearity: Linearity: Linearity: Linearity:
Settling Time (to within +/-2% FS): Settling Settling Settling Settling Time (to within +/-2% FS): Time (to within +/-2% FS): Time (to within +/-2% FS): Time (to within +/-2% FS):
Pr Pr Pr Pr Pressur essur essur e Insensitivity: e Insensitivity:
essure Insensitivity: essur e Insensitivity: e Insensitivity:
Contr tr tr tr trol Range: Con Con Con Con ol Range: ol Range: ol Range: ol Range:
V V V V V alve Shut Down: alve Shut Down: alve Shut Down: alve Shut Down: alve Shut Down:
Z Z Z Z Z er er er er ero Stability: o Stability: o Stability: o Stability:
o Stability:
T T T T T emper emper emper atur atur e Coefficien e Coefficient: t: t: t: t: e Coefficien
emper emperatur atur ature Coefficien e Coefficien
Rate-of-Decay P Rate-of-Decay P Rate-of-Decay Performance: Rate-of-Decay P Rate-of-Decay P erformance: erformance: erformance: erformance:
Flow Rate: Flow Rate: Flow Rate: Flow Rate: Flow Rate:
T T T T T emper emperatur emper emper atur atur ature Sensitivity: e Sensitivity: e Sensitivity: e Sensitivity:
emper atur e Sensitivity:
Pr Pr Pr Pr Pressur essur essur e Sensitivity: e Sensitivity:
essure Sensitivity: essur e Sensitivity: e Sensitivity:
Minimum Detectable Change Minimum Detectable Change Minimum Detectable Change Minimum Detectable Change Minimum Detectable Change
fr fr fr fr from Commissioning Baseline: om Commissioning Baseline: om Commissioning Baseline: om Commissioning Baseline: om Commissioning Baseline:
Ratings Ratings Ratings Ratings Ratings
Oper Oper ating ating ating T T T T T emper emper emper atur atur e Range: e Range:
Oper Operating Oper ating emperatur emper ature Range: atur e Range: e Range:
Differ Differ Differ Differen en en en ential Pr Differ tial Pr tial Pressur tial Pr tial Pr essur essur essure Range**: essur e Range**: e Range**: e Range**: e Range**:
Maximum Oper Maximum Operating Pr Maximum Oper Maximum Oper Maximum Oper ating Pr ating Pr ating Pr ating Pressur
Pneumatic Pneumatic Pneumatic Pneumatic Pneumatic V V V V V alve Oper alve Operating Pr alve Oper alve Oper alve Oper ating Pr ating Pr ating Pr ating Pressur
Leak In Leak In Leak Integrity (external): tegrity (external): tegrity (external): tegrity (external):
Leak In Leak In tegrity (external):
Mec Mec Mechanical Mec Mec hanical hanical hanical hanical
V V V V V alve alve T T T T T ype: alve alve ype: ype:
alve ype: ype:
W W W W W etted Materials: etted Materials: etted Materials: etted Materials: etted Materials:
Surface Finish: Surface Finish: Surface Finish: Surface Finish: Surface Finish:
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights: Status Lights: Status Lights:
Status Lights: Status Lights:
Alarms: Alarms: Alarms: Alarms: Alarms:
Display T T T T T ype: Display Display Display Display ype: ype: ype: ype:
Viewing Distance: Viewing Distance: Viewing Distance:
Viewing Distance: Viewing Distance:
Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution: Units Displayed / Resolution:
Electrical Electrical
Electrical Electrical Electrical
Electrical Connection: Electrical Connection: Electrical Connection: Electrical Connection: Electrical Connection:
Digital Communication: Digital Communication: Digital Communication: Digital Communication: Digital Communication:
Diagnostic / Service P Diagnostic / Service P ort: ort:
Diagnostic / Service Port: Diagnostic / Service P Diagnostic / Service P ort: ort:
P P P P P ower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption: ower Supply/Consumption:
Compliance Compliance Compliance Compliance Compliance
EMC EMC
EMC EMC EMC
En En En En Envir vir vir vir vironmen onmen onmen onmen onmental Compliance tal Compliance tal Compliance tal Compliance tal Compliance
1-12
3 sccm to 5 slm (N2 Eq.)
N2, O2, Ar, H2, SF6, NH3, CO2, Cl2, HBr, NF3, CF4, CH4, CH3F, CH2F2, SiCl4 (@ 100 Torr),
C4F6-q (@ 800 Torr), C4F8 (@ 1200 Torr), N2O, CHF3, SiH2Cl2, C5F8, He
+/-1.0% S.P. (10-100% F.S.), +/-1% S.P. plus +/-0.04% F.S. (2-10% F.S.)
< +/- 0.15% S.P.
Included in accuracy
<300ms (<860 sccm N2 Equivalent), <400ms (861-5000 sccm N2 Equivalent)
< 1% S.P. up to 5 psi/sec upstream press. spike
1-100%
< 0.5% of F.S. N2
< +/- 0.5% F.S. per year
Span: 0.05% setpoint per °C, Zero: 0.005% F.S. per °C
(ROD by default is disabled/off. It should not be enabled until after MFC is installed and properly commissioned)
Maximum flow rate for which an ROD measurement can be obtained is 800 sccm
+/- 0.04% S.P./Deg C
+/- 0.04% F.S./psi
Zero Drift: +/- 0.02% F.S.
Valve Leak: +0.1% F.S.
Repeatability: +/- 0.3% S.P. (SiCl4 +/- 0.5% from 5-100% S.P. up to 100 sccm flow)
10-50°C
3-860 sccm = 7-45 psid, 861- 5000 sccm = 10-45 psid
**Typical pressure drop. Actual pressure drop will be gas and flow dependent.
Argon gas applications require higher differential pressure.
Low vapor pressure gases require an inlet pressure of > 100 Torr, with vacuum on outlet
(example SiCl4). Contact Brooks Technical Support for more information.
essur essure: e: e: e: e: essur essur 100 psia max
essure: e: e: e: e: essur essur essur 43.5 psia - 72.5 psia
1x10-10 atm. cc/sec He
Normally Closed
SEMI F20 UHP Compliant 316L VIM/VAR, Hastelloy C-22,316L Stainless Steel, 304 Stainless Steel, KM-45
4μ inch Ra (0.1 μm Ra)
MFC Health, Network Status
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption,
Sensor Drift, Flow Error, Valve Leak
Top Mount Electronically Rotatable Integrated LCD
Fixed / 10 feet
Flow (%), Temp. (°C), Pressure (psia, kPa) / 0.1 (unit)
Analog/RS-485 via 9-Pin "D" connector, DeviceNet via 5-Pin "M12" connector
RS485+ (model specific), DeviceNet (model specific), RS485 Diagnostic Port (all models)
RS485 via 2.5 mm jack
DeviceNet: +11-25 Vdc., 545 mA max. @ 11 Vdc., 250 mA (max.) @ 24 Vdc.,
Analog /RS485: +/-15 Vdc. (+10%), 6 Watts (max) or +24 Vdc +/-10%
EC Directive 2004/108/EC CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive 2011/65/2006
Reach Directive EC 1907/2006
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017