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Appendix A: GF100 Series Gas Table
GF100 Series
Table A-1B GF100 Series Gas Table - Codes 109-875, Bins SH40 to SH50
Gas
Code Gas Symbol
Gas Name
109 C3H9N
Trimethylamine
110 SF6
Sulfur Hexafluoride
111 C4H10-d)
Isobutane
117 C4H10-c)
Butane
118 C2F6
Hexafluoroethane (Freon-116)
121 WF6
Tungsten Hexafluoride
128 C3F8
Perfluoropropane
129 C4F8
Octafluorocyclobutane
138 C3F6
Hexafluoropropylene
155 C2HF5
PENTAFLUOROETHANE (FREO
160 CH2F2
Difluoromethane
185 CH6Si
Methylsilane (MONO)
190 (CH3)3SiH
Trimethylsilane (TMSi)
266 C5F8
Octafluorocyclopentene
270 C4F6
Hexafluoro-2-butyne
297 C4F6-q)
Hexafluoro Butadiene-1-3
354 C5F8O
Epoxyperfluorocyclopentene
368 Si3H9N
Trisilylamine (TSA)
371 C4H11N
Dimethylethylamine
509 10%GeH4/H2
10%Germane/Hydrogen
516 10%PH3/H2
10%Phosphine/Hydrogen
527 10%PH3/N2
10%Phosphine/Nitrogen
528 4.5%PH3/N2
4.5%Phosphine/Nitrogen
536 20%O2/He
20%Oxygen/Helium
537 1%PH3/Ar
1%Phosphine/Argon
542 5%H2/N2
5%Hydrogen/Nitrogen
557 1%B2H6/H2
1%Diborane Hydrogen
563 1%PH3/H2
1%Phosphine/Hydrogen
595 3%B2H6/N2
3%Diborane/Nitrogen
597 3%H2/N2
3%Hydrogen/Nitrogen
603 30%He/O2
30%Helium/Oxygen
604 30%O2/He
30%Oxygen/Helium
606 4%H2/He
4%Hydrogen/Helium
607 4%H2/N2
4%Hydrogen/Nitrogen
615 5%B2H6/Ar
5%Diborane/Argon
626 5%PH3/Ar
5%Phosphine/Argon
632 50%PH3/SiH4
50%Phosphine/Silane
649 10%O2/He
10%Oxygen/Helium
653 2%SiH4/N2
2%SILANE/NITROGEN
654 5%B2H6/N2
5%Diborane/Nitrogen
662 .8%B2H6/N2
.8%Diborane/Nitrogen
674 10%PH3/He
10%Phosphine/Helium
676 7.5%PH3/SiH4
7.5%Phosphine/Silane
693 5%PH3/He
5%Phosphine/Helium
695 2%B2H6/N2
2%Diborane/Nitrogen
698 10%GeH4/Ar
10%Germane/Argon
700 4%H2/Ar
4%Hydrogen/Argon
701 10%B2H6/H2
10%Diborane/Hydrogen
762 5%H2/He
5%Hydrogen/Helium
766 5%B2H6/He
5%Diborane/Helium
780 5%SiH4/He
5%Silane/Helium
805 1%B2H6/Ar
1%Diborane/Argon
820 15%B2H6/H2
15%Diborane/Hydrogen
824 2%SO2/N2
2%Sulfur Dioxide/Nitrogen
837 30%GeH4/Ar
30%Germane/Argon
875 20%O2/Ar
20%Oxygen/Argon
Table A-1C GF100 Series Gas Table - Codes 878-5022, Bins SH40 to SH50
Gas
Code Gas Symbol
Gas Name
878 3%C2H4/He
3%Ethylene/Helium
881 10%B2H6/Ar
5%Diborane/Argon
897 2.7%C2H4/He
2.7%Ethylene/Helium
898 1%GeH4/H2
1%Germane/Hydrogen
910 .5%GeH4/H2
0.5%Germane/Hydrogen
916 2%PH3/H2
2%Phosphine/Hydrogen
917 50%C3H6-b)/N2
50%Propylene/Nitrogen
925 10%C3H6-b)/N2
10%Propylene/Nitrogen
929 10%CH4/N2
10%Methane/Nitrogen
930 3.9%H2/N2
3.9%Hydrogen/Nitrogen
939 10%B2H6/He
10%Diborane/Helium
946 30%C2H4/He
30%Ethylene/Helium
950 10%H2/He
10%Hydrogen/Helium
953 15%H2/B2H6
15%Hydrogen/Diborane
958 17%CH4/CO2
17%Methane/Carbon Dioxide
962 20%CH6Si/H2
20%Methylsilane (MONO)/Hydrog
965 50%CH3SiHCl2/H250%Dichloromethylsilane/Hydroge
978 20%GeH4/H2
20%Germane/Hydrogen
979 0.5%B2H6/He
0.5%Diborane/Helium
980 20%F2/Ar
20%Fluorine/Argon
982 5%HF/N2
5%Hydrogen Fluoride/Nitrogen
983 3%H2S/CO
3%Hydrogen Sulfide/Carbon Mon
984 1.4%C2H2/Ar
1.4%Acetylene/Argon
985 2%Ge2H6/H2
2%Digermane/Hydrogen
986 38%SiCl4/O2
38%Silicon Tetrachloride/Oxygen
987 20%H2S/20%CO2/ 20%Hydrogen Sulfide/20%Carbon
988 20%SiH2Cl2/H2
20%Dichlorosilane/Hydrogen
989 0.1%Cl2/N2
0.1%Chlorine/Nitrogen
990 1%HCl/N2
1%Hydrogen Chloride/Nitrogen
991 3%BCl3/N2
3%Boron Trichloride/Nitrogen
992 18%NO/N2
18%Nitric Oxide/Nitrogen
993 9%NO/41%N2/H2 9%Nitric Oxide/41%Nitrogen/H2
994 20%H2/Ar
20%Hydrogen/Argon
5022 COS-Special
Carbonyl Sulfide (Special)
For reference only, consult factory on the latest tables.
A-2
Min inlet pressure for vac. exhaust
(PSIA)
SH40
SH41
SH40-SH47 SH48
SH49
SH50 Low High Low High Low High Low High Low
6.7
8.7
19.7
19.7
19.7
20.7
19.7
19.7
19.7
20.7
19.7
19.7
19.7
20.7
19.7
19.7
9.7
11.7
19.7
19.7
19.7
19.7
19.7
19.7
19.7
19.7
24.7
29.7
3
6
9.7
14.7
3
4
6.7
9.7
14.7
9.7
14.7
14.7
19.7
19.7
6.0
7.2
8.7
8.7
20.7
20.7
3
9
10
14.7
14.7
3
9
10
19.7
24.7
3
9
10
20.7
29.7
3
10
11
19.7
29.7
4
13
14
19.7
29.7
5
14
15
24.7
29.7
3
10
11
24.7
29.7
3
10
11
19.7
19.7
3
10
11
20.7
29.7
3
9
10
24.7
29.7
3
10
11
24.7
29.7
4
11
12
19.7
29.7
4
12
13
19.7
19.7
5
14
15
24.7
29.7
3
10
11
24.7
4
12
13
27.7
32.7
5
13
14
16.7
24.7
3
6
19.7
24.7
5
13
14
19.7
24.7
3
10
11
24.7
29.7
3
9
10
24.7
29.7
3
10
11
14.7
19.7
4
13
14
14.7
14.7
3
6
12.7
14.7
4
13
14
24.7
29.7
3
10
11
24.7
29.7
4
12
13
24.7
29.7
5
14
15
14.7
14.7
3
8
19.7
19.7
5
14
15
14.7
16.7
4
12
13
14.7
16.7
4
13
14
14.7
16.7
5
14
15
14.7
14.7
3
8
14.7
14.7
3
10
11
14.7
14.7
3
10
11
14.7
14.7
4
13
14
Min inlet pressure for vac. exhaust
(PSIA)
SH40
SH41
SH40-SH47 SH48
SH49
SH50 Low High Low High Low High Low High Low
19.7
19.7
4
13
14
24.7
29.7
4
11
12
19.7
19.7
4
13
14
20.7
20.7
3
10
11
20.7
20.7
3
10
11
21.7
21.7
3
10
11
19.7
21.7
3
5
19.7
21.7
3
8
19.7
21.7
3
10
11
24.7
29.7
3
10
11
19.7
19.7
4
11
12
19.7
24.7
3
10
11
19.7
19.7
4
13
14
19.7
19.7
3
4
24.7
29.7
3
7
14.7
19.7
3
7
11.7
13.7
3
4
19.7
24.7
3
8
14.7
19.7
5
14
15
24.7
29.7
4
13
14
24.7
29.7
4
10
11
24.7
29.7
3
10
11
24.7
29.7
5
14
15
24.7
29.7
3
10
11
24.7
29.7
29.7
29.7
3
5
24.7
29.7
3
9
10
24.7
29.7
3
8
24.7
29.7
4
10
11
24.7
29.7
4
10
11
24.7
29.7
3
9
10
24.7
29.7
3
10
11
24.7
29.7
4
10
11
24.7
29.7
4
13
14
24.7
29.7
3
7
SH42
SH43
SH44
SH45
High
Low
3
8
9
25
26
78
79
240
241
3
8
9
25
26
77
78
237
238
3
7
8
23
24
70
71
216
217
3
8
9
25
26
76
77
234
235
3
8
9
23
24
71
72
218
219
3
5
6
16
17
50
51
150
151
3
5
6
16
17
50
51
154
155
3
5
6
16
17
50
51
154
155
3
6
7
20
21
60
61
184
185
3
8
9
25
26
77
78
235
236
7
19
20
57
58
174
175
533
534 1612 1613
5
12
13
37
38
111
112
340
341 1050 1051
3
7
8
20
21
62
63
189
190
3
5
6
14
15
44
45
134
135
3
6
7
19
20
57
58
176
177
3
6
7
17
18
52
53
160
161
3
4
5
13
14
40
41
122
123
3
6
7
20
21
60
61
181
182
3
6
7
20
21
63
64
190
191
28
29
86
87
260
261
800
801 2400 2401
28
29
90
91
275
276
813
814 2500 2501
30
31
91
92
271
272
850
851 2510 2511
30
31
94
95
280
281
880
881 2600 2601
38
39
120
121
360
361 1102 1103 3331 3332 10000 10001 21000 21001 42000
42
43
128
129
390
391 1200 1201 3600 3601
30
31
92
93
280
281
860
861 2600 2601
30
31
91
92
270
271
850
851 2510 2511
30
31
90
91
273
274
850
851 2531 2532
29
30
90
91
270
271
850
851 2500 2501
30
31
92
93
280
281
860
861 2600 2601
33
34
100
101
301
302
950
951 2800 2801
37
38
113
114
345
346 1060 1061 3203 3204
41
42
126
127
400
401 1200 1201 3600 3601 11000 11001 23000 23001 46000
30
31
92
93
280
281
860
861 2600 2601
38
39
116
117
353
354 1084 1085 3278 3279
41
42
125
126
380
381 1170 1171 3600 3601
7
20
21
62
63
190
191
580
581 1730 1731
41
42
123
124
380
381 1150 1151 3500 3501 10500 10501 22000 22001 44000
30
31
93
94
280
281
870
871 2600 2601
28
29
86
87
262
263
804
805 2500 2501
30
31
93
94
280
281
870
871 2600 2601
40
41
120
121
370
371 1100 1101 3400 3401 10000 10001 21000 21001 43000
7
19
20
58
59
175
176
540
541 1610 1611
41
42
125
126
380
381 1150 1151 3500 3501 10500 10501 22000 22001 44000
30
31
93
94
280
281
870
871 2600 2601
38
39
114
115
350
351 1070 1071 3300 3301
42
43
130
131
390
391 1200 1201 3700 3701
9
26
27
81
82
241
242
760
761 2300 2301
41
42
125
126
400
401 1200 1201 3600 3601 11000 11001 23000 23001 46000
38
39
115
116
350
351 1100 1101 3300 3301 10000 10001 21000 21001 42000
40
41
122
123
380
381 1140 1141 3500 3501 10500 10501 22000 22001 44000
42
43
130
131
390
391 1200 1201 3600 3601
9
25
26
76
77
230
231
710
711 2120 2121
30
31
93
94
280
281
870
871 2600 2601
30
31
93
94
280
281
860
861 2600 2601
39
40
120
121
370
371 1120 1121 3400 3401
SH42
SH43
SH44
SH45
High
Low
40
41
125
126
375
376 1150 1151 3500 3501 10700 10701 22100 22101 45000
35
36
105
106
320
321 1000 1001 3000 3001
40
41
125
126
377
378 1158 1159 3502 3503 10700 10701 22200 22201 45000
30
31
91
92
275
276
850
851 2530 2531
30
31
92
93
280
281
860
861 2600 2601
30
31
91
92
275
276
850
851 2530 2531
6
17
18
53
54
160
161
500
501 1500 1501
9
26
27
82
83
243
244
760
761 2300 2301
29
30
91
92
272
273
850
851 2520 2521
30
31
92
93
280
281
860
861 2600 2601
34
35
103
104
314
315
965
966 2918 2919
30
31
90
91
275
276
850
851 2551 2552
40
41
125
126
380
381 1200 1201 3500 3501 10700 10701 22200 22201 45000
5
14
15
42
43
130
131
400
401 1200 1201
8
23
24
70
71
210
211
650
651 2000 2001
8
23
24
71
72
212
213
660
661 2000 2001
5
14
15
42
43
130
131
400
401 1200 1201
9
26
27
81
82
241
242
750
751 2240 2241
42
43
130
131
400
401 1200 1201 3700 3701 11000 11001 23000 23001 47000
39
40
120
121
360
361 1100 1101 3400 3401
30
31
92
93
280
281
860
861 2600 2601
30
31
92
93
280
281
860
861 2600 2601
42
43
130
131
390
391 1200 1201 3600 3601
30
31
92
93
280
281
860
861 2600 2601
6
16
17
50
51
150
151
460
461 1400 1401
27
28
85
86
252
253
790
791 2400 2401
9
24
25
74
75
222
223
700
701 2100 2101
30
31
94
95
280
281
880
881 2600 2601
30
31
94
95
280
281
880
881 2600 2601
29
30
91
92
270
271
850
851 2510 2511
30
31
94
95
280
281
880
881 2600 2601
30
31
94
95
281
282
880
881 2610 2611
40
41
120
121
370
371 1120 1121 3400 3401
8
20
21
60
61
183
184
562
563 1700 1701
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
SH46
SH47
SH48
High
Low
High
Low
High
Low
High
720
721
1910
1911
4000
4001
8100
715
716
1900
1901
4000
4001
8000
653
654
1800
1801
3800
3801
7600
706
707
1910
1911
4000
4001
8100
658
659
1750
1751
3700
3701
7400
460
461
1200
1201
2500
2501
5000
465
466
1200
1201
2500
2501
5100
465
466
1170
1171
2430
2431
4900
556
557
1470
1471
3050
3051
6110
711
712
1900
1901
4000
4001
8000
4300
4301
9000
9001 18000
2800
2801
5900
5901 11600
572
573
1530
1531
3200
406
407
1050
1051
2200
2201
4500
533
534
1400
1401
2900
500
501
1270
1271
2640
2641
5270
369
370
1000
1001
2100
2101
4200
560
561
1410
1411
3000
3001
6000
580
581
1530
1531
3200
3201
6500
7200
7201 15000 15001 30000
7600
7601 15500 15501 31000
7100
7101 14500 14501 29000
7200
7201 15000 15001 30000
9800
9801 20000 20001 40000
7400
7401 15100 15101 31000
7900
7901 16100 16101 33000
7800
7801 16000 16001 32000
7100
7101 14500 14501 29000
7400
7401 15100 15101 30100
8100
8101 17000 17001 34000
9700
9701 20000 20001 40000
7400
7401 15100 15101 30100
8900
8901 18200
9500
9501 19400 19401 39000
4800
4801 10000 10001 20000
7300
7301 15000 15001 30000
7000
7001 14100 14101 28100
7300
7301 15000 15001 30000
4500
4501
9400
9401 18400
7200
7201 15000 15001 30000
8700
8701 18000 18001 36000
9800
9801 20000 20001 40000
7000
7001 14200 14201 29000
9700
9701 20000 20001 40000
6500
6501 13300 13301 27000
7300
7301 15000 15001 30000
6900
6901 14100 14101 28100
9200
9201 19000 19001 38000
SH46
SH47
SH48
High
Low
High
Low
High
Low
High
8100
8101 17000 17001 34000
8000
8001 16200 16201 33000
8000
8001 16300 16301 33000
8000
8001 16200 16201 33000
4100
4101
8600
8601 17000
6400
6401 13100 13101 26100
7200
7201 15000 15001 30000
7400
7401 15100 15101 30100
9000
9001 18400 18401 37000
7800
7801 16000 16001 32000
3400
3401
7100
7101 14000
5400
5401 11000 11001 22000
5900
5901 12000 12001 24000
3100
3101
6600
6601 13000
6600
6601 13500 13501 27000
9000
9001 18400 18401 37000
7200
7201 15000 15001 30000
7200
7201 15000 15001 30000
9700
9701 20000 20001 40000
7200
7201 15000 15001 30000
3600
3601
7500
7501 15000 15001
6500
6501 13300 13301 27000
5900
5901 12000 12001 24000
7400
7401 15000 15001 30000
7400
7401 15000 15001 30000
7000
7001 14400 14401 29000
7300
7301 15000 15001 30000
7700
7701 16000 16001 32000
9400
9401 19200 19201 39000
4500
4501
9400
9401 18300
(990-100-0082-R17)
April, 2017
SH49
SH50
Low
High
Low
High
8001
8200
8201 13400
7601
8200
8201 13200
8101
8200
8201 14100
SH49
SH50
Low
High
Low
High
15001 15002 25000
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