Section 4 Maintenance & Troubleshooting; Overview; Maintenance - Brooks Instrument GF100 Serie Manual De Instrucciones

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017

4-1 Overview

4-2 Maintenance

Section 4 Maintenance & Troubleshooting
No routine maintenance is required on the Brooks GF100 Series devices.
If an in-line filter is used, the filtering elements should be periodically
replaced or cleaned. Any precision unit such as a flow controller requires
occasional servicing, especially if it has been operating for an extended
period of time. If reactive gases are being used, it is recommended that
you send the device to a Brooks Service Center for cleaning and
recalibration. Please follow the instructions for removal, product packaging
and product return instructions found in Section 2- Installation—Return
Shipment. All active process instrumentation and equipment is subject to
aging and wear from their environment. This includes temperature,
mechanical stress, component tolerance shift, contaminant buildup,
oxidation, and other influences. The effects are gradual, but over time the
changes can affect the accuracy of even the best equipment. Therefore, it
is recommended to re-zero the device at 6 month intervals. Refer to
Section 2-18 Performance Checks for re-zeroing instructions.
GF100 Series
4-1