Gf135 Inlet Valve Installation - Brooks Instrument GF100 Serie Manual De Instrucciones

Section 2 Installation
GF100 Series

2-20 GF135 Inlet Valve Installation

2-16
When installing the GF135 –
1. Connect the MFC tubing labeled "IN" to a CDA or N2 supply of 90 ±3 psi.
2. Next, the MFC tubing labeled "OUT" should be connected to the
customer upstream pneumatic isolation valve.
Note – The air passes through a failsafe normally open valve inside the
GF135 and is connected back to the inlet isolation valve. For safe
operation and in line with S2 compliance, the GF135 cannot override and
open the inlet isolation valve.
Outlet - Pneumatic
Isolation Valve
Line
Figure 2-19 GF135 Series Showing Inlet/Outlet Pneumatic Isolation Valve Lines
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
Inlet - Pneumatic
Isolation Valve Line
April, 2017