Brooks Instrument GF100 Serie Manual De Instrucciones página 54

Section 4 Maintenance & Troubleshooting
GF100 Series
Table 4-2 GF100 Series Troubleshooting Guide (Continued)
Symptoms & Possible Causes
6. Gas flow, or GF100 Series pressure reading
oscillates.
Are inlet and outlet pressures stable?
NOTE: Most GF100 Series calibrated
with nitrogen will oscillate
with hydrogen or helium.
7. GF100 Series does not read zero pressure
when gas is shut off.
Is the differential pressure across
the GF100 Series really zero?
Is the GF100 Series configured properly
in the tool software?
Is the GF100 Series mounted to the
proper attitude?
8. OEM tool does not read correct GF100 Series
zero reading.
Is the differential pressure across the
GF100 Series really zero?
Is the supply voltage within specified range?
Is the GF100 Series mounted in the proper attitude?
Is the flow output signal of the GF100 Series
really zero?
9. Zero Drift.
Improper zero of the GF100 Series?
Excessive Valve leakage?
4-6
Corrective Action
If outlet pressure is unstable, check for
(no oscillation or hunting) a faulty vacuum pump,
or hunting at a downstream valve.
Check inlet pressure on tool. A faulty
pressure regulator can make the
GF100 Series appear to oscillate.
Adjust inlet pressure up or down by 2
psig increments until hunting disappears.
Verify common gas pressure is
within range.
NOTE: Hunting or oscillation can be
contributed to multiple GF100 Series sharing
a common gas manifold. Therefore,
inspect gas delivery sources to
the gas box. (for example; two tools
sharing a common gas bottle and
calling for gas at the same time.) Valve leak.
Unregulated gas pressure from Facilities.
Verify that the pressure is correct for
the gas and range. If the GF100 Series has
been contaminated, it may not be able
to close, and therefore, will not zero.
Equalize the pressure across the GF100 Series by
opening it briefly. Set up the GF100 Series for zeroing.
Then perform the zeroing procedure in Section 2-14.
Use the tool software to verify.
Refer to the side can label on the GF100 Series.
The GF100 Series should be calibrated
in the attitude it will be operating at.
GF100 Series valve leakage.
Incorrect MFC zero.
GF100 Series aging or sensor stabilization.
Zero is not correct.
Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017