Brooks Instrument GF100 Serie Manual De Instrucciones página 69

Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
Bulgarian
Brooks Instrument ,
.
,
- .
:
:
.
.
: (1)
.
,
:
„ "
Brooks Instrument
- 25 mm
25 mm
(
Brooks Insturment
„D" „
.
CE
.
:
:
.
:
1. .
2.
3.
:
,
,
.
,
,
,
,
,
,
.
.
Brooks Instrument
,
,
,
,
0,5 bar (g)
(PED).
1" (inch)
1" (inch), - ,
/ ) Brooks Instrument
( EMC 2014/30/EU).
,
,
,
"
.
.
.
,
.
.
.
,
,
.
Appendeix C Essential Instructions
!
,
,
, ,
.
,
/
Brooks Instrument
.
,
,
,
.
- 25 mm
PED
2014/34/EU.
1.
I, II III PED.
,
:
CE
, 100%-
.
.
(ESD)
,
,
.
.
(ESD)
- (NMOS, SMOS
.
GF100 Series
,
Brooks Instrument.
,
.
.
.
.
.
.
/
.
. (2)
,
.
.
.
,
.
.
(PED)
1" (inch),
.
(SEP).
(EMC)
, .
.
.
360°.
100%-
,
.
. .).
.
,
,
,
C-1