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Installation and Operation Manual
X-TMF-GF100-Series-MFC-eng
Part Number: 541B137AAG
April, 2017
A-1 GF100 Series Gas Table
Table A-1A GF100 Series Gas Table - Codes 1-108, Bins SH40 to SH50
Gas
Code Gas Symbol
Gas Name
1 He
Helium
2 Ne
Neon
4 Ar
Argon
5 Kr
Krypton
6 Xe
Xenon
7 H2
Hydrogen
8 Air
Air
9 CO
Carbon Monoxide
10 HBr
Hydrogen Bromide
11 HCl
Hydrogen Chloride
12 HF
Hydrogen Fluoride
13 N2
Nitrogen
14 D2
Deuterium
15 O2
Oxygen
16 NO
Nitric Oxide
17 HI
Hydrogen Iodide
18 F2
Fluorine
19 Cl2
Chlorine
22 H2S
Hydrogen Sulfide
23 H2Se
Hydrogen Selenide
25 CO2
Carbon Dioxide
27 N2O
Nitrous Oxide
28 CH4
Methane
29 NH3
Ammonia
31 PH3
Phosphine
32 SO2
Sulfur Dioxide
33 CH3F
Methyl Fluoride
34 COS
Carbonyl Sulfide
35 AsH3
Arsine
37 ClCN
Cyanogen Chloride
38 C2H4
Ethylene
39 SiH4
Silane
42 C2H2
Acetylene
43 GeH4
Germane
46 COF2
Carbonyl Fluoride
48 BF3
Boron Trifluoride
49 CHF3
Fluoroform (Freon-23)
53 NF3
Nitrogen Trifluoride
54 C2H6
Ethane
58 B2H6
Diborane
60 COCl2
Phosgene
62 PF3
Phosphorus Trifluoride
63 CF4
Carbon Tetrafluoride (Freon-14)
67 SiH2Cl2
Dichlorosilane
69 C3H6-b)
Propylene
70 BCl3
Boron Trichloride
72 ClO3F
Perchloryl Fluoride
77 ClF3
Chlorine Trifluoride
85 C2H7N
Dimethylamine
88 SiF4
Silicon Tetrafluoride
89 C3H8
Propane
94 C2F4
Tetrafluoroethylene
97 Si2H6
DISILANE
99 GeF4
Germanium Tetrafluoride
104 C4H8-i)
Butene
108 SiCl4
Silicon Tetrachloride
For reference only, consult factory on the latest tables.
Table A-1 GF100 Series Gas Table
(Reference the following pages, A-1 and A-2).
Min inlet pressure for vac. exhaust
(PSIA)
SH40
SH41
SH40-SH47 SH48
SH49
SH50 Low High Low High Low High Low High Low
19.7
24.7
29.7
5
14
15
24.7
5
14
15
24.7
29.7
39.7
44.7
5
14
15
29.7
4
11
12
24.7
3
6
14.7
14.7
19.7
3
10
11
24.7
29.7
3
10
11
24.7
29.7
3
10
11
24.7
3
8
24.7
29.7
3
10
11
14.7
17.7
3
10
11
24.7
29.7
29.7
32.7
3
10
11
14.7
14.7
3
10
11
24.7
29.7
29.7
34.7
3
10
11
24.7
29.7
3
10
11
24.7
29.7
3
5
24.7
29.7
3
9
10
24.7
29.7
3
6
24.7
29.7
3
8
24.7
29.7
3
7
24.7
29.7
29.7
29.7
3
7
24.7
29.7
29.7
29.7
3
7
24.7
24.7
29.7
3
8
24.7
24.7
29.7
3
8
19.7
24.7
3
7
19.7
24.7
3
6
24.7
29.7
3
7
24.7
29.7
3
7
24.7
29.7
3
6
14.7
21.7
3
5
24.7
29.7
3
6
24.7
29.7
3
6
16.7
19.7
3
6
24.7
29.7
3
6
19.7
19.7
21.7
3
5
19.7
24.7
3
5
24.7
24.7
24.7
26.7
3
5
24.7
29.7
24.7
26.7
3
5
17.7
29.7
3
5
19.7
19.7
3
4
12.7
14.7
3
3
19.7
24.7
3
4
24.7
24.7
24.7
26.7
3
4
14.7
19.7
3
3
19.7
19.7
3
4
11.7
14.7
3
3
14.7
20.7
3
4
14.7
20.7
3
4
9.7
14.7
3
3
19.7
24.7
3
4
9.7
11.7
3
3
19.7
19.7
3
3
19.7
19.7
3
3
20.7
24.7
3
3
20.7
24.7
8.7
Appendix A: GF100 Series Gas Table
SH42
SH43
SH44
SH45
High
Low
42
43
128
129
400
401 1194 1195 3609 3610 11100 11101 23100 23101 47000 47001 100000
42
43
129
130
400
401 1207 1208 3650 3651 10700 10701 22100
42
43
130
131
400
401 1214 1215 3671 3672 10000 10001 20200 20201 41000 41001
32
33
100
101
300
301
930
931 2800 2801
7
19
20
58
59
178
179
546
547 1651 1652
30
31
92
93
280
281
860
861 2600 2601
30
31
92
93
280
281
860
861 2600 2601
30
31
92
93
280
281
860
861 2600 2601
9
25
26
77
78
235
236
723
724 2187 2188
30
31
92
93
280
281
860
861 2600 2601
30
31
94
95
281
282
880
881 2610 2611
30
31
92
93
280
281
860
861 2600 2601
30
31
94
95
280
281
880
881 2600 2601
30
31
92
93
280
281
860
861 2600 2601
30
31
92
93
280
281
860
861 2600 2601
6
15
16
46
47
141
142
432
433 1305 1306
27
28
83
84
254
255
780
781 2358 2359
7
19
20
57
58
173
174
531
532 1604 1605
9
25
26
76
77
232
233
713
714 2155 2156
8
22
23
66
67
202
203
620
621 1874 1875
8
22
23
69
70
209
210
642
643 1942 1943
8
21
22
65
66
200
201
611
612 1849 1850
9
23
24
71
72
215
216
660
661 2000 2001
9
24
25
73
74
223
224
685
686 2072 2073
8
22
23
67
68
205
206
629
630 1901 1902
7
17
18
52
53
157
158
483
484 1459 1460
8
22
23
67
68
204
205
625
626 1890 1891
8
20
21
60
61
183
184
562
563 1700 1701
7
18
19
55
56
170
171
510
511 1550 1551
6
15
16
46
47
142
143
435
436 1320 1321
7
17
18
54
55
163
164
501
502 1516 1517
7
18
19
56
57
170
171
523
524 1581 1582
7
18
19
57
58
170
171
530
531 1600 1601
7
17
18
53
54
161
162
495
496 1500 1501
6
17
18
53
54
160
161
500
501 1500 1501
6
16
17
50
51
150
151
457
458 1381 1382
6
16
17
48
49
145
146
445
446 1344 1345
6
15
16
46
47
140
141
430
431 1300 1301
6
16
17
50
51
153
154
469
470 1418 1419
5
12
13
38
39
116
117
358
359 1082 1083
4
11
12
35
36
106
107
325
326 1000 1001
5
14
15
42
43
129
130
400
401 1200 1201
5
13
14
40
41
121
122
372
373 1123 1124
4
10
11
29
30
89
90
273
274
5
12
13
36
37
110
111
338
339 1022 1023
4
10
11
31
32
94
95
289
290
5
12
13
38
39
114
115
350
351 1060 1061
5
11
12
35
36
107
108
327
328 1000 1001
4
11
12
34
35
101
102
310
311
5
11
12
34
35
103
104
316
317 1000 1001
4
10
11
32
33
100
101
300
301
4
10
11
31
32
100
101
300
301
4
10
11
30
31
92
93
282
283
4
10
11
30
31
92
93
282
283
3
5
6
17
18
52
53
159
160
3
6
7
18
19
56
57
172
173
GF100 Series
SH46
SH47
SH48
High
Low
High
Low
High
Low
High
7160
7161 14900
4210
4211
8760
8000
8001 16400 16401 33000 33001
7400
7401 15000 15001 30000
7300
7301 15000 15001 30000
5610
5611 11700
6900
6901 14200 14201 29000
7400
7401 15000 15001 30000
7200
7201 15000 15001 30000 30001
8100
8101 16500 16501 33000
7200
7201 15000 15001 30000 30001
7200
7201 15000 15001 30000
3340
3341
6960
6961 13900
6700
6701 14000 14001 28000
4850
4851 10100 10101 20200
5900
5901 12100 12101 24100
4770
4771 10000 10001 20000
5300
5301 11000 11001 22000 22001
5100
5101 10400 10401 21000 21001
5800
5801 12000 12001 24000 24001
6000
6001 12200 12201 25000 25001
5200
5201 10700 10701 21300
3800
3801
7920
7921 15800
5200
5201 10600 10601 21200
4500
4501
9400
9401 18300
4000
4001
8500
8501 17000
3400
3401
7060
7061 14100
4400
4401
9300
9301 18200
4400
4401
9300
9301 18200
4400
4401
9300
9301 18200
4000
4001
8400
8401 16400
4000
4001
8400
8401 16500 16501
3800
3801
7900
7901 15500
3600
3601
7600
7601 15000 15001
3600
3601
7500
7501 15000 15001
4000
4001
8300
8301 16300
3100
3101
6400
6401 12600
2520
2521
5250
5251 10500
3200
3201
6800
6801 13300
3010
3011
6400
6401 12600 12601
824
825
2140
2141
4450
4451
8900
2800
2801
5900
5901 11700
874
875
2230
2231
4650
4651
9300
2800
2801
5800
5801 11500
2560
2561
5340
5341 10700
960
961
2530
2531
5400
5401 10600
2600
2601
5400
5401 10600
910
911
2420
2421
5100
5101 10100
900
901
2300
2301
4900
4901
9800
853
854
2300
2301
4900
4901
9800
860
861
2200
2201
4700
4701
9400
480
481
1420
1421
2950
2951
5900
520
521
1320
1321
2750
(990-100-0082-R17)
SH49
SH50
Low
High
Low
High
42000 42001 55000
73000
40000 40001 55000
37000 37001 55000
28000 28001 39000
25000 25001 37000
46000
46000
21000
17000 17001 26000
17000 17001 26000
17000 17001 22000
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