Pump Purging And Venting; Purge And Vent Installation; Pump Used With Corrosive Gases - Agilent Technologies Turbo-V 2K-G Serie Manual De Instrucciones

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Technical Information

Pump Purging and Venting

Pump Purging and Venting
The Turbo-V 2K-G pump is equipped with an integrated purging and
venting valve device. Both valves are fed through a single gas port,
with 1/8 NPT thread or Swagelok connector.

Purge and Vent Installation

To install the gas purge and vent line it is necessary to unscrew the
purge/vent port cover, and then connect the gas line.

Pump Used With Corrosive Gases

To prevent damage to the bearings, an inert gas must flow into the
pump body around the upper bearing towards the forevacuum line.
To supply the inert purge gas (e. g. nitrogen) to the pump through the
purge port, connect a gas purge line to the pump.
The purging device automatically provides 20 sccm when fed with 1
bar (14 psi) absolute (at-mospheric pressure).
To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of
CAUTION!
20 sccm (0.33 mbar l/s). This value can be exceeded, according to the process
requirements. Please contact Agilent for specific applications.
The purge gas throughput of 20 sccm with the rec-ommended
forepump allows to achieve a high vacuum pressure in the 10-6 mbar
range.
The recommended gas flow maintains a pressure into the pump body
higher than the forevacuum pressure.
The recommended procedure to vent the system and the pump
avoiding the contact between the pump bearings and the corrosive
gas is described in the following points:
362/372
Turbo-V 2K-G Pumping System User Manual / 87-900-968-01 (G)

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969-8871969-8873

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