Exchange Of Th Pumping Element - Agilent Technologies VacIon Plus 800 Manual Del Usuario

Technical Information

Exchange of th Pumping Element

VacIon Plus 800 pumps are designed to allow the replacement of the pumping
elements through the ion pump flange.
For ordering information (part numbers and quantities to be ordered for each
pump), please refer to the local Agilent Technologies representative.
1 Disconnect the power supply from the system.
2 Disconnect the High Voltage cable from the Feedthrough of the Ion pump
3 Remove the pump from the system.
4 Remove the Feedthrough (See section Exchange of the High Voltage
Feedthrough in this manual)
5 Remove the internal high-voltage connection (see Figure 47).
6 Remove the element holding brackets (see Figure 47).
7 Pull the element out of the pocket and remove it through the inlet flange.
8 Clean the internal part of the pump with the appropriate solvent.
9 Reposition the new pumping element inside the pump and lock in place with
the holding brackets (see Figure 47).
10 Reconnect the high-voltage connection to the pumping element.
11 Reinstall the Feedthrough (see section Exchange of the High Voltage
Feedthrough in this manual) and test for continuity to the pumping element.
12 Place a blank flange over the pump inlet and leak-check the Ion pump with a
leak detector.
13 Reconnect the pump to the system.
14 Reconnect the High Voltage cable to the Feedthrough of the ion pump
15 Reconnect the power supply to the system.
16 Bake out the blanked off pump while it is operating and leave it to cool down;
then verify that the base pressure is below 10-9 Torr (mbar). (See Backout
section of this manual).
228 Agilent VacIon Plus 800 User Manual