Technical Information
Exchange of the High Voltage Feedthrough
The high voltage feedthrough contains a ceramic insulator that can be damaged
CAUTION
if excessive force is applied in torque, in bending, or in tension. When installing
or removing the feedthrough, the applied torque should not exceed 2 Nm. Rotate
the feedthrough gently when making the threaded connection to avoid
excessive force.
1
Remove the 6 bolts of the Mini-ConFlat flange connection.
2
Remove the cable connection disc (if present, depending on the feedthrough
type).
3
Gently relieve the feedthrough from the metal gasket connection and turn the
feedthrough counterclockwise until it is completely detached from the internal
high voltage threaded connection.
4
Replace the feedthrough and the copper gasket, making sure that the
feedthrough is connected to the pump's internal connector. Check that the
feedthrough is not shorted. Put the ion pump and the system under vacuum
following the instructions in the paragraph "Operating Procedure".
Figure 48 High voltage feedthrough connection
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Agilent VacIon Plus 800 User Manual