Bakeout Of Vacion Pump With The Integral Heaters - Agilent Technologies VacIon Plus 800 Manual Del Usuario

Technical Information

Bakeout of VacIon Pump with the Integral Heaters

1 The integral heaters are to be powered with the appropriate voltage. Please
refer to the inscription on the heaters to apply the correct voltage.
2 The integral heaters are designed to provide in every point of the ion pump a
minimum temperature in the range 150-200°C, if the pump is wrapped in a 3-
fold aluminum foil.
Keep the high voltage cable out of the aluminum foils in order to not exceed the
NOTE
temperature limits reported in Table 1.
3 Bakeout the VacIon pump for 24 hours. If the pump is used in heavy gas load
applications, it is recommended to bakeout the pump for a longer period.
4 Wait until the pump cools down to room temperature and recovers its base
pressure before using it in the application.
Do not touch the heaters and the ion pump during the heating and cooling
WARNING
phases. The high temperature may cause serious damage.
It is worth noticing that the bakeout of the ion pump alone is not sufficient to
NOTE
achieve the ultimate pressure. The complete vacuum system must be baked
according to the indications in the paragraph "Bakeout operation".
Agilent VacIon Plus 800 User Manual 225